MEMS Pressure Sensor Products
Base on MIS process technology, the company has developed various products which cover differential pressure sensor chip, absolute pressure sensor chip, high-temperature absolute pressure sensor chip and pressure sensor series products.The unique design gives products small size, good stability and high sensitivity. The chip integrates Force Sensing Resistors to form a Wheatstone full bridge without the need for additional external resistors.
Differential Pressure Sensor Chip
Product Size | 0.8mm×0.8mm |
Typical Pressure Range | -10~10 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 80mV (Customizable) |
Linearity | ±0.15%FS |
10kPa Differential Pressure Sensor Chip (TUB010D01)
Product Size | 0.6mm×0.6mm |
Typical Pressure Range | -40~40 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Full Scale Output | ±0.10%FS |
40kPa Differential Pressure Sensor Chip (TUB040D01)
Product Size | 0.4mm×0.4mm |
Typical Pressure Range | -100~100 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.10%FS |
100kPa Differential Pressure Sensor Chip (TUB100D01)
Absolute Pressure Sensor Chip
Product Size | 0.4mm×0.4mm |
Typical Pressure Range | 30~110 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.15%FS |
100kPa Absolute Pressure Sensor Chip (TUB100A01B)
Product Size | 0.4mm×0.4mm |
Typical Pressure Range | 0~200 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.15%FS |
200kPa Absolute Pressure Sensor Chip (TUB200A01)
Product Size | 0.4mm×0.4mm |
Typical Pressure Range | 350 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.20%FS |
350kPa Absolute Pressure Sensor Chip (MIS350A01)
Product Size | 0.4mm×0.4mm |
Typical Pressure Range | 700 kPa |
Operating Temperature | -40~125 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.20%FS |
700kPa Absolute Pressure Sensor Chip (MIS700A01)
High-temperature Absolute Pressure Sensor Chip
Product Size | 0.55mm×0.55mm |
Typical Pressure Range | 0~150 kPa |
Operating Temperature | -55~350 ℃ |
Full Scale Output | 70mV (Customizable) |
Linearity | ±0.15%FS |
150kPa High Temperature Absolute Pressure Sensor Chip (TUB150A01HTO)
Pressure Sensor Products
Typical Pressure Range | 1kPa/10kPa/ 40kPa/100kPa |
Storage Temperature | -40~125 ℃ |
Package Form | SOP or DIP |
Output Signal | Analog or Digit |
Product Size | Multi-size |
Differential Pressure Sensor Series (MIS-10070 Series)
Product Size | 3.6mm×3.6mm×1.4mm |
Typical Pressure Range | 30~120 kPa |
Operating Temperature | -20~85℃ |
Output Signal | I²C |
Waterproof Sensor (MIS-3636LW)
Product Size | 6.4mm×6.2mm×3.0mm |
Typical Pressure Range | 100kPa/200kPa/350kPa/700kPa/1MPa/1.5MPa |
Operating Temperature | -40~125 ℃ |
Output Signal | I²C / SPI |
Temperature and Pressure Sensors Series (MIS-6462LW Series)
Product Size | 1.5mm×1.0mm×0.9mm |
Typical Pressure Range | 100kPa/200kPa/350kPa/700kPa/1MPa/1.5MPa |
Operating Temperature | -40~125 ℃ |
Output Signal | Original Signal |
Absolute Pressure Sensor Series (MIS-1510LW Series)
Product Size | 2.6mm×2.3mm×1.5mm |
Typical Pressure Range | 100kPa/200kPa/350kPa/700kPa/1MPa/1.5MPa |
Operating Temperature | -40~125 ℃ |
Output Signal | Original Signal |